Measurement of Au Deposition Rates with Low-Energy Mass Separated Ion Beam Deposition Apparatus
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چکیده
منابع مشابه
Low Energy Ion Assisted Vapor Deposition
The performance of multilayered thin film materials often depends sensitively upon the (physical) roughness and degree of (chemical) mixing at interfaces. Irradiation of a growth surface with an assisting ion beam is often used to modify surface roughness. Molecular dynamics has been used to explore the use of low energy (less than 20 eV) Xe+ and Ar+ assisted deposition of model Ni/Cu/Ni multil...
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A combination of molecular dynamics simulations and experiments has been used to investigate the use of various low energy ion assisted vapor deposition approaches for controlling the interfacial structures of a model copper/tantalum multilayer system. Films were grown using argon ion beam assistance with either a fixed or modulated ion energy during metal deposition. The effect of sequential i...
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The laser damage resistance of optical coatings is a key point for a large number of applications. The aim of this work is to test and analyze the laser damage resistance of a thin film material commonly used for high power applications (SiO2) and deposited with different techniques: Electron Beam Deposition, Ion Assisted Deposition, Low Voltage Reactive Ion Plating and Dual Ion Beam Sputtering...
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ژورنال
عنوان ژورنال: Shinku
سال: 2006
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.49.177